Semiconductor and Electronic component production equipment

Carrier Washer

OKH-MR-series

Using a twin fluid spray cleaning method improves both the cleaning effect and the drying efficiency !

Outline
Features
Specifications

Outline

Carrier washer is a washing and drying machine for wafer carriers and carrier boxes.
It conducts washing by a high pressure shower and drying by means of centrifugal force and clean air (or N2).

Features

Improved drying efficiency !

High-speed rotation is used to scatter moisture from the surface of workpieces through centrifugal force, while clean air is blown in through a filter for drying. (N2 specifications can also be used.)
The equipment realizes improvement in drying effects. By using a unique nozzle, the pressurized air blows away droplets which could not be scattered away with the centrifugal force alone.

Eco-specifications that consider running costs

Since fine particles are sprayed, this machines consumes a third of the amount of deionized water compared to conventional machines(our company’s comparison).
This eco design considers both the equipment price and running costs.

Specifications

Target workpieces	Carrier × 2　　Carrier box × 2
Dimensions	[For 6-inch carriers]　　W950×D1340×H1200（H2020　when lid is open）(mm)
Material	［Main unit］ＰＶＣ　ＴＳＰ-333（Ivory）　［Rotor］ＳＵＳ304
Cycle time	15min / cycle　※Also varies based on the carrier shape
Revolution	10～600min-¹　　　Possible 6-speed settings
Timer	0 ～ 999 sec
Recipes	10types

Utility

Power source	AC200V±10%　50/60Hz　30A
Pneumatic air	Pressure: 0.5MPa or greater　Consumption: 30L/min （ANR)
Drying air	Clean air Pressure： 0.3MPa or greater　Consumption： 450L/min （ANR)
Deionized water	Pressure： 0.2Mpa or greater　Deionized water consumption： 12L/min
Exhaust outlet	VP50, one location (from the chamber)　(exhaust volume: 8M3/min）
Drainage outlet	VP40, one location (from the chamber)