Semiconductor and Electronic component production equipment
Wafer Transfer Equipment
Wafer Transfer Equipment
OTD-series
Gentle! Precise! Speedy!
Providing the three elements requierd for wafer transfer equipment.
Providing the three elements requierd for wafer transfer equipment.
time：1min 30sec
Outline
The wafer transfer equipment is an automatic machine for transferring wafers back and forth from carrier to carrier or between carriers and boards.
It can handle face to face transfer or back to back transfer.
Features
Prevent particle generation
Motor driving prevents particle generation.
Original wafer chuck mechanism
Unique wafer chuck mechanism reduces shaking during the transport of wafers, allowing careful transfer into quartz boats for the precise and safe transfer of even heavy loads such as compound wafers.
Option
・Static electricity remover (Ionizer) ・Full cover ・Area sensor for safety
Full surface cover and area sensor equipped
Safety is the first priority! Fell secure with small investment!
Clear covers are attached on 4 sides (right, left, top, and back) except the front side. An area sensor is attached at the front working space which prevents wrong operation like taking out the carrier board by immediately stopping the device. Perfect safety precautions.
Specifications
| Model |
OTS-15
 (Floor model) |
OTD-25
 (Tabletop model) |
OTD-35
 (Tabletop model) |
|---|---|---|---|
| Number of stages | ⅠStage （cassette × 1） |
ⅡStage （cassette × 1 , boat × 1） |
ⅢStage （cassette × 2 , boat × 1） |
| Motor | Servo | ||
| Transfer method | 1ca transfer between different cassettes |
1ca to 1bt bidirectional transfer |
2ca to 1bt bidirectional transfer |
| Transfer speed | Min 40 seconds ＋ cassette exchange time |
Min 50 seconds（adjustable） | Min 90 seconds（adjustable） |
| Dimensions | W400×D510×H1187(㎜) | W433×D490×H625(㎜) | W629×D490×H625(㎜) |
| Safety mechanisms | Cassette sensor, wafer sensor, wafer overload sensor, error alarm, emergency stop | ||
| Power source | AC200V（50/60Hz） | ||
Related Equipment
- •Carrier to carrier transferor・・・・・・・・・・Transfers between carriers of same kind
- •Turn-over (face to face) transferor・・・・Pattern surface facing each other
- •Handling-carrier to line-carrier transferor・・・Transfers between carriers of different kinds
- Pitch conversion transfer・・・・・・・・・・・・・・・Applicable to half pitch or pitch of twice
Option
- ・Automatic wafer counter
- ・Area sensor for safety
- ・full cover for safety
- ・Aligner (Orientation flat alignment)
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