Semiconductor and Electronic component production equipment
UV Curing System
Full-auto UV curing system
High-pressure mercury type
FHUV-series
Compact and high power!
Outline
Full Automatic UV Curing Systems use a lamp of high power emission.
Pressing the start button will start and continue the automatic operation from taking out a workpiece from the magazine, emitting UV radiation, and putting the workpiece back to the magazine until the procedures have been completed on all workpieces.
Select a high-pressure mercury lamp or a metal halide lamp to suit your workpiece.
Features
- Compact size
- Up to 10 recipes can be set. (Irradiation speed changes depending on a recipe.)
- Up to 4 lamp powers can be set.
- Accumulated radiation dose and UV illuminance are displayed. (During irradiation)
- Select between high-pressure mercury lamp or metal halide lamp to suit your workpiece.
- Automatic changeover function to change the size
- Grip rings can be irradiated as well.
- Function to identify the completion of UV radiation
Function
Applicable to LSI wafer, memory wafer, LED wafer, laser wafer, sensor wafer, power device wafer, or other purposes.
Specifications
 |
| Dimensions | W1300 × D1400 × H1350(㎜) | |
|---|---|---|
| Weight | Approx. 400 kg | |
| Drive air | 0.4 Mpa or more | |
| UV illuminance | 200mW/cm² more | |
| N₂ | 0.2 Mpa or more 100L/min more | |
| Power source | AC 3-Phase 200V 50/60 Hz 100A | |
※The above specifications are those of an 8-in semiautomatic model.
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- 高圧水銀仕様 フルオートUV Curing System