Semiconductor and Electronic component production equipment
UV Curing System
Black Light System
Fully Automatic UV Curing System
FBUV-series
A newly installed rotary table realized uniform irradiation!
time：1min 20sec
Outline
This is a fully automatic UV curing system which unloads a wafer frame fed by a cassette, irradiates it with UV rays and then houses it automatically.
It is possible for the machine to handle two different sizes of wafer frames, 8" and 12", using an automatic cassette changeover system.
Features
- This equipment is capable of fully automatic irradiation in cassette units.
- A rotary turntable provides even irradiation without uniformity problems.
- A wide array of UV irradiation parameters
(settings of irradiation time and accumulated light intensity) - Display of the UV lighting intensity on the touch panel on a realtime basis.
- Energy-saving performance realized by a black light system.
- Good for both 8-inch and12-inch cassettes.
(automatic cassette changeover using a touch panel)
All you need to do is just set a cassette.
Specifications
 |
| Dimensions | W770 × D1090 × H1200(㎜) | |
|---|---|---|
| Weight | Approx. 250 kg | |
| Driving air | 0.4-0.5Mpa 65L/min | |
| UV light intensity | 9mW/cm² or more | |
| N₂ | 0.4-0.5Mpa 100L/min | |
| Power source | AC100V 50/60Hz 30A | |
- ■interlock
- Equipped with an interlock on the cover・maintenance door of the work inlet of the device main unit. If the door is opened during operation, the operation will be stopped.
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