Semiconductor and Electronic component production equipment

UV Curing System

Black Light System

Manual UV Curing System

UVI-MA-series

High-power and low-cost!
Although it is table top type compact design, it is suitable for a wide range of work pieces.

Outline
Function
How to operation
Features
Specifications

Outline

Manual UV Curing Systems with black light lamp cure UV curing tape adhesive.

UVI-1202MB7
Illuminance is monitored with the illuminance sensors installed under the lamps.
The sensors will promptly detect if the illuminance lowers or a lamp has burned out, which will save the lost time due to a shortage of irradiation.

Function

Standard lamps with 365 nm of wavelength are perfect for curing and peeling off protection films in the back grinding process, and for curing UV curing resin to pick up a die after the dicing process. Used for development or production purposes.

How to operation

Open the upper cover. Set a workpiece. Operate the switches to perform the UV radiation.
Input irradiation conditions by touch panel operation.
When it reaches at the preset accumulated radiation dose or the preset time, the lamps will go out and the buzzer will go off.

Features

High-power and low-cost

The use of 36W black light achieves bright illumination at a low cost.
The even distribution of illumination has also been improved.
(comparison made by OKK)

Selective irradiation patterns

Among irradiation settings, accumulated light intensity or irradiation time can be set to any desired value.
Setting can be done easily using a one-touch panel.

N2 purging

N2 purging will avoid the oxygen inhibition at UV curing.

With a monitoring function

The major factors of UV irradiation, illumination and temperature, can be monitored on a real-time basis.
An alarm will warn of any unusual conditions.

Easy to maintain

Easy to check lamps or replace lamps due to its opening and closing style.

Compact style

Although it is a table top type compact design, it is good for a wide range of work sizes from 6" to 12".
UV Curing range :410mmx360mm(Max)

Multilingual

Display language can be switched among Japanese, English, or Chinese.

Reliable design

The use of black light eliminates the generation of ozone. It truly has ecological features.
It has a safety function in that the lights turn OFF automatically as soon as the lid is opened while in operation.

Mask (Option)

Using a mask will focus radiation on a wafer/a chip, preventing irradiation to unnecessary parts.
Masks can be exchanged in different sizes with one touch operation.

Specifications

Dimensions	W520 × D550 × H200(㎜)
Material	SUS304
Weight	Approx. 30 kg
Irradiation area	W410 × D360(㎜)
Applicable work pieces	6inch dicing frame × 2 8inch dicing frame × 1 12inch dicing frame × 1 (*Unable to irradiate the entire area of 12inch.)
UV lamp	Black-light blue lamp 36W × 7
Intensity of UV illumination	9mW/cm2or higher
N₂	0.4～0.5Mpa　100L/min
Power source	AC100V　50/60Hz　10A

*A masking table is addit ionally necessary in order to mask the dicing frame from UV irradiation.

Black light type manual UV irradiator Safety / sensors

■UV sensor: UV power monitors are installed under UV lamps to measure illuminance.
■Temperature sensor: A thermostat will be used to control the temperature of the UV radiation section.
If the temperature inside the UV radiation section exceeds 60°C, the lamps will be turned off, an alarm will go off, and the device will stop operation.
If the temperature falls below 60 °C, pressing the reset switch on the touch panel will release the alarm and pressing the reset switch will start the operation for the rest of the irradiation time.
■Lid close sensor: The proximity sensor operates to check if the lamps go off if the lid opens while in the intermittent radiation.
If the lid opens while in operation, the device will temporarily stop operation.