Semiconductor and Electronic component production equipment

UV Curing System

Manual, High-brightness LED

UVI-LEDseries

Dual Wavelength
Full-surface radiation
Speedy UV radiation with no unevenness

Outline
Function
How to operation
Features
Specifications

Outline

Desktop Manual UV-LED Curing Systems cure UV curing tape adhesives.
High-bright and long-life LED lamps are used as the light source.
Equipped with the unique mechanism that permits radiation with wide-range wavelength.

UVI-1200ML
The illuminance sensors are installed in the chamber. Processes are controlled by the accumulated radiation dose.
The original LED lamp monitoring function immediately detects a lighting failure, which prevents product loss.

Function

The standard-equipped LED lamp with 365 nm of wavelength is perfect for curing and peeling off protection films in the back grinding process or for curing UV curing resin in picking up a die after the dicing process of semiconductor wafer manufacturing. Can be used for a variety of purposes such as in development or in production.

Operation

Open the upper cover. Set a workpiece. Operate the switches to perform the UV radiation.
Input radiation conditions by simple operation on the front touch panel.
When reaching the preset accumulated radiation dose or the preset time, the lamps go out and the buzzer goes off.

Features

Selectable radiation patterns

Either the accumulated radiation dose or the radiation time can be selected.

N2 purge

N2 purging avoids the oxygen inhibition at UV curing. The purging time can be set as desired.

N2 purging

N2 purging will avoid the oxygen inhibition at UV curing.

Eco design

Long-life and eco-friendly specifications with no ozone generation.
Safety function of turning off the lamps if the cover opens during the operation.

Compact design/Large monitor

Provides radiation on workpieces of a variety of sizes including 12-in DFs.
Equipped with a large touch panel, providing excellent visibility and operability. The cover opening/closing design provides excellent operability; leads to easy operation in detecting the LED lamps or replacing the substrate.
Applicable to a variety of workpiece sizes from 2 to 12 inches, despite its desktop compact design.
Applicable to workpieces of up to W380 mm×D380 mm.

Multilingual support

The display language can be switched among Japanese, English, or Chinese.

Touch panel

Mask (Option)

Using the mask will focus radiation on a wafer/a chip, forbidding the unnecessary radiation on other parts.
Masks can be exchanged for different sizes with one-touch operation.

Specifications

Dimensions	W600 × D700 × H347(㎜)
Weight	Approximately 60 kg
Radiation area	W380 mm × D380 mm
Applicable workpiece	6-in DF 8-in DF 12-in DF
Light source	LED（Dual wavelength）
UV illuminance	50 mW/cm2 or higher（approx）
N₂	0.4 to 0.5 MPa 100 L/min
Power	AC200V～240V　50/60Hz　20A

Manual UV Curing System: Safety/Sensor

■UV sensor: To measure illuminance, the UV power monitor is installed under each UV lamp.
■Safety: Excessive temperature rise preventing function.
Auto-off function of lamps if the cover is opened.
■Maintenance: OKK’s original light source.
The light source can be replaced by the user.
The downtime can be minimized.